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Contents:
1. Introduction to Semiconductor Devices, 2. Overview of Interconnect-Copper and Low-Κ Integration, 3. Silicon Materials, 4. SOI Materials and Devices, 5. Surface Preparation, 6. Supercritical Carbon Dioxide in Semiconductor Cleaning, 7. Ion Implantation, 8. Dopant Diffusion, 9. Oxidation and Gate Dielectrics, 10. Silicides, 11. Rapid Thermal Processing, 12. Low-Κ Dielectrics, 13. Chemical Vapor Deposition, 14. Atomic Layer Deposition, 15. Physical Vapor Deposition, 16. Damascene Copper Electroplating, 17. Chemical-Mechanical Polishing, 18. Optical Lithography, 19. Photoresist Materials and Processing, 20. Photomask Fabrication, 21. Plasma Etch, 22. Equipment Reliability, 23. Overview of Process Control, 24. In-Line Metrology, 25. In-Situ Metrology, 26. Yield Modeling, 27. Yield Management, 28. Electrical, Physical, and Chemical Characterization, 29. Failure Analysis, 30. Reliability Physics, 31. Effects of Terrestrial Radiation on Integrated Circuits, 32. Integrated-Circuit Packaging, 33. 300 Mm Wafer Fab Logistics and Automated Material Handling Systems, 34. Factory Modeling, 35. Economics of Semiconductor Manufacturing. ISBN 9781574446753
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Pages : 1720
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