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Micosystem Design
by Senturia
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1195.00
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20
Table Of Contents
Part 1 Getting Started
Introduction
An Approach To Mems Design
Microfabrication
Process Integration
Part 2 Modeling Strategies
Lumped Modeling
Energy-Conserving Transducers
Dynamics
Part 3 Domain-Specific Details
Elasticity
Structures
Energy Methods
Dissipation And Thermal Energy Domain
Lumped Modeling Of Dissipative Processes
Fluids
Part 4 Circuit And System Issues
Electronics
Feedback System
Noise
Part 5 Case Studies
Packaging
A Piezoresistive Pressure Sensor
A Capacitive Accelerometer
Electrostatics Projection Displays
A Piezoelectric Rate Gyroscope
Dna Amplification
A Microbride Gas Sensor
ISBN 9788181285461
Pages : 720
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