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  Micosystem Design
 

Micosystem Design

by Senturia

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  Your Price : Rs 956.00
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  Table Of Contents
Part 1 Getting Started

Introduction
An Approach To Mems Design
Microfabrication
Process Integration

Part 2 Modeling Strategies

Lumped Modeling
Energy-Conserving Transducers
Dynamics

Part 3 Domain-Specific Details

Elasticity
Structures
Energy Methods
Dissipation And Thermal Energy Domain
Lumped Modeling Of Dissipative Processes
Fluids

Part 4 Circuit And System Issues

Electronics
Feedback System
Noise

Part 5 Case Studies

Packaging
A Piezoresistive Pressure Sensor
A Capacitive Accelerometer
Electrostatics Projection Displays
A Piezoelectric Rate Gyroscope
Dna Amplification
A Microbride Gas Sensor
ISBN 9788181285461
 


Pages : 720
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